JPH0235447U - - Google Patents
Info
- Publication number
- JPH0235447U JPH0235447U JP11384888U JP11384888U JPH0235447U JP H0235447 U JPH0235447 U JP H0235447U JP 11384888 U JP11384888 U JP 11384888U JP 11384888 U JP11384888 U JP 11384888U JP H0235447 U JPH0235447 U JP H0235447U
- Authority
- JP
- Japan
- Prior art keywords
- drive section
- substrate
- robot
- seal
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000004381 surface treatment Methods 0.000 claims description 2
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11384888U JPH0235447U (en]) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11384888U JPH0235447U (en]) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0235447U true JPH0235447U (en]) | 1990-03-07 |
Family
ID=31354055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11384888U Pending JPH0235447U (en]) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235447U (en]) |
-
1988
- 1988-08-29 JP JP11384888U patent/JPH0235447U/ja active Pending
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